Fundamental Principles of Optical Lithography

Released on by Chris Mack
preview-18

  • Fundamental Principles of Optical Lithography Book Detail

  • Author : Chris Mack
  • Release Date : 2011-08-10
  • Publisher : John Wiley & Sons
  • Genre : Technology & Engineering
  • Pages : 503
  • ISBN 13 : 1119965071
  • File Size : 69,69 MB
DOWNLOAD BOOK

Fundamental Principles of Optical Lithography by Chris Mack PDF Summary

Book Description: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Disclaimer: www.yourbookbest.com does not own Fundamental Principles of Optical Lithography books pdf, neither created or scanned. We just provide the link that is already available on the internet, public domain and in Google Drive. If any way it violates the law or has any issues, then kindly mail us via contact us page to request the removal of the link.

Optical Lithography

Optical Lithography

File Size : 90,90 MB
Total View : 8504 Views
DOWNLOAD

This book is written for new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formatio

Field Guide to Optical Lithography

Field Guide to Optical Lithography

File Size : 50,50 MB
Total View : 6233 Views
DOWNLOAD

This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the Universit

Principles of Lithography

Principles of Lithography

File Size : 70,70 MB
Total View : 7446 Views
DOWNLOAD

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were