Reactive Sputter Deposition

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  • Reactive Sputter Deposition Book Detail

  • Author : Diederik Depla
  • Release Date : 2008-06-24
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 584
  • ISBN 13 : 3540766642
  • File Size : 50,50 MB

Reactive Sputter Deposition by Diederik Depla PDF Summary

Book Description: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

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Reactive Sputter Deposition

Reactive Sputter Deposition

File Size : 3,3 MB
Total View : 8788 Views
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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detai

Reactive Sputter Deposition

Reactive Sputter Deposition

File Size : 93,93 MB
Total View : 7246 Views
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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detai

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology

File Size : 6,6 MB
Total View : 214 Views
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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputt

Magnetrons, Reactive Gases and Sputtering

Magnetrons, Reactive Gases and Sputtering

File Size : 83,83 MB
Total View : 1872 Views
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This handbook covers the fundamental aspects of reactive magnetron sputter deposition. This physical vapor deposition technique is used to grow compound thin fi