Semiconductor and Integrated Circuit Fabrication Techniques

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III-V Integrated Circuit Fabrication Technology

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GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the proce

Microelectromechanical Systems

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Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectiv

Integrated Circuit Fabrication

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This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length cours

Introduction to Semiconductor Manufacturing Technology

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For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufact