Shape and Functional Elements of the Bulk Silicon Microtechnique

Released on by Joachim Frühauf
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  • Shape and Functional Elements of the Bulk Silicon Microtechnique Book Detail

  • Author : Joachim Frühauf
  • Release Date : 2005-12-05
  • Publisher : Springer Science & Business Media
  • Genre : Technology & Engineering
  • Pages : 229
  • ISBN 13 : 3540268766
  • File Size : 96,96 MB
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Shape and Functional Elements of the Bulk Silicon Microtechnique by Joachim Frühauf PDF Summary

Book Description: This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

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Silicon Wet Bulk Micromachining for MEMS

Silicon Wet Bulk Micromachining for MEMS

File Size : 29,29 MB
Total View : 4885 Views
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Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in ter