The Design and Construction of a High Density Plasma Source

Released on by Harish Subbaraman
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  • The Design and Construction of a High Density Plasma Source Book Detail

  • Author : Harish Subbaraman
  • Release Date : 2006
  • Publisher :
  • Genre :
  • Pages : 106
  • ISBN 13 :
  • File Size : 84,84 MB
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The Design and Construction of a High Density Plasma Source by Harish Subbaraman PDF Summary

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High Density Plasma Sources

High Density Plasma Sources

File Size : 72,72 MB
Total View : 2564 Views
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This book presents a comprehensive description of the most promising high density plasma sources operated at low and intermediate pressures which are used, or c

High Density Plasma Sources

High Density Plasma Sources

File Size : 3,3 MB
Total View : 975 Views
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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing,