EUV Lithography

Released on by Vivek Bakshi
preview-18

  • EUV Lithography Book Detail

  • Author : Vivek Bakshi
  • Release Date : 2009
  • Publisher : SPIE Press
  • Genre : Art
  • Pages : 704
  • ISBN 13 : 0819469645
  • File Size : 10,10 MB
DOWNLOAD BOOK

EUV Lithography by Vivek Bakshi PDF Summary

Book Description: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.

Disclaimer: www.yourbookbest.com does not own EUV Lithography books pdf, neither created or scanned. We just provide the link that is already available on the internet, public domain and in Google Drive. If any way it violates the law or has any issues, then kindly mail us via contact us page to request the removal of the link.

EUV Lithography

EUV Lithography

File Size : 83,83 MB
Total View : 5285 Views
DOWNLOAD

Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This b

EUV Sources for Lithography

EUV Sources for Lithography

File Size : 1,1 MB
Total View : 5548 Views
DOWNLOAD

This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume conta

Descriptive English

Descriptive English

File Size : 20,20 MB
Total View : 1660 Views
DOWNLOAD

A number of national level examinations like IAS Mains, State PCS, IES, IFS, etc. check the English language aptitude of candidates with a compulsory English la