Silicide Technology for Integrated Circuits

Released on by Institution of Electrical Engineers
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  • Silicide Technology for Integrated Circuits Book Detail

  • Author : Institution of Electrical Engineers
  • Release Date : 2004-12-21
  • Publisher : IET
  • Genre : Social Science
  • Pages : 302
  • ISBN 13 : 9780863413520
  • File Size : 5,5 MB
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Silicide Technology for Integrated Circuits by Institution of Electrical Engineers PDF Summary

Book Description: This is the first book to provide guidance on the development and application of metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages. Other key topics covered are fundamentals, present and future silicide technology for Si-based devices, and characterisation methods. Suitable for engineers and students in microelectronics.

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